Mécanique Des Couches Minces Fonctionnelles : Instabilité Et Adhésion

We have studied thin film instabilities and in particular buckling driver delami-nation of thin films on rigid substrates. In the first part we studied residual stressin molybdenum thin films deposited by magnetron sputtering. With these resultswe can deposit a film with high compressive stresses for delamination. In the secondpart, compressive stressed layers are used to induce buckling driven delamination ofa stack with a weak interface. Propagation as well as morphology of delaminationare studied. Parameters playing a role in the buckling morphology are identifiedand enable drawing of a phase diagram. The last part of the work is dedicated tothe development of a numerical model coupling buckling of thin plate and cohesivezone in order to model buckling driven delamination. This model has been solvedby finite elements method. Results are sound with experiments.tel-00868409,version1-1Oct2013